JPS6132888Y2 - - Google Patents

Info

Publication number
JPS6132888Y2
JPS6132888Y2 JP1981074192U JP7419281U JPS6132888Y2 JP S6132888 Y2 JPS6132888 Y2 JP S6132888Y2 JP 1981074192 U JP1981074192 U JP 1981074192U JP 7419281 U JP7419281 U JP 7419281U JP S6132888 Y2 JPS6132888 Y2 JP S6132888Y2
Authority
JP
Japan
Prior art keywords
belt
wafer
photoresist
semiconductor wafer
belt body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981074192U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57188705U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981074192U priority Critical patent/JPS6132888Y2/ja
Publication of JPS57188705U publication Critical patent/JPS57188705U/ja
Application granted granted Critical
Publication of JPS6132888Y2 publication Critical patent/JPS6132888Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Belt Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Coating Apparatus (AREA)
  • Laminated Bodies (AREA)
  • Structure Of Belt Conveyors (AREA)
JP1981074192U 1981-05-22 1981-05-22 Expired JPS6132888Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981074192U JPS6132888Y2 (en]) 1981-05-22 1981-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981074192U JPS6132888Y2 (en]) 1981-05-22 1981-05-22

Publications (2)

Publication Number Publication Date
JPS57188705U JPS57188705U (en]) 1982-11-30
JPS6132888Y2 true JPS6132888Y2 (en]) 1986-09-25

Family

ID=29869970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981074192U Expired JPS6132888Y2 (en]) 1981-05-22 1981-05-22

Country Status (1)

Country Link
JP (1) JPS6132888Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH068109Y2 (ja) * 1988-03-31 1994-03-02 日本バルカー工業株式会社 ウエハー搬送用ベルト

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55137548U (en]) * 1979-03-22 1980-09-30

Also Published As

Publication number Publication date
JPS57188705U (en]) 1982-11-30

Similar Documents

Publication Publication Date Title
JPS6132888Y2 (en])
JPS62128539A (ja) ウエハの搬送装置
KR20090119569A (ko) 약액도포장치
JPH09150937A (ja) 振動フィーダ
JPH01145910A (ja) 搬送装置
JPH05255899A (ja) 自動めっき装置
JPH0144384B2 (en])
JPH0672535A (ja) 柱状体の搬送装置
JP2761093B2 (ja) 塗装装置
JPH0986748A (ja) 鋼板等の搬送材の搬送装置
JPS5840609Y2 (ja) 搬送装置
JP2001151345A (ja) 搬送装置
JPH0471658A (ja) タイヤ帯状材料への接着剤塗布方法及びその装置
JPS63128637A (ja) 半導体装置の製造装置
JPS6019050Y2 (ja) チエ−ンコンベヤ
JPH08151108A (ja) ベルトコンベヤ搬送装置
JPH08203982A (ja) ウエハの搬送治具
JPS62238636A (ja) 半導体ウエ−ハ搬送装置
JPS5943712A (ja) 基板搬送装置
JPS593860Y2 (ja) 反転装置
JPS5928484B2 (ja) 薄板体の搬送装置
JPS63179512A (ja) ベルトコンベアのトレイ
JPH0889912A (ja) 洗浄装置
JP4602390B2 (ja) 塗布乾燥装置
JPS63308338A (ja) 半導体基板搬送ベルト